Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999912 | Lithographic apparatus and sensor calibration method | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Ruud Antonius Catharina Maria Beerens +2 more | 2011-08-16 |
| 7978307 | Gas bearing, and lithographic apparatus provided with such a bearing | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Adrianus Antonius Theodorus Dams | 2011-07-12 |
| 7639345 | Lithographic apparatus | Joost Jeroen Ottens, Aschwin Lodewijk Hendricus Johannes Van Meer, Wim Tjibbo Tel, Rene Theodorus Petrus Compen, Petrus Johannes Gerrits | 2009-12-29 |
| 7405810 | Method and apparatus for positioning a substrate on a substrate table | Pieter Renaat Maria Hennus | 2008-07-29 |
| 7078715 | Lithographic apparatus and apparatus adjustment method | Sjoerd Nicolaas Lambertus Donders, Theodorus Marinus Modderman, Theodorus Petrus Maria Cadee | 2006-07-18 |