| 12315756 |
Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use |
Michael Marinus Anna STEUR, Nicolaas Ten Kate, Siegfried Alexander Tromp, Antonius Franciscus Johannes De Groot |
2025-05-27 |
| 12242204 |
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate |
Ruud Antonius Catharina Maria Beerens, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Dennis Dominic VAN DER VOORT, Edwin Johannes Cornelis Bos +2 more |
2025-03-04 |
| 11914942 |
Method for predicting resist deformation |
Chrysostomos BATISTAKIS, Roger Josef Maria Jeurissen |
2024-02-27 |
| 11709988 |
Method for predicting resist deformation |
Chrysostomos BATISTAKIS, Roger Josef Maria Jeurissen |
2023-07-25 |
| 10904994 |
Supply system for an extreme ultraviolet light source |
Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent |
2021-01-26 |
| 10499485 |
Supply system for an extreme ultraviolet light source |
Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent |
2019-12-03 |
| 10481498 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus |
Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko, Peter Michael Baumgart +4 more |
2019-11-19 |
| 9442380 |
Method and apparatus for generating radiation |
Ramin Badie, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin +1 more |
2016-09-13 |