Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860554 | Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method | Mark Johannes Hermanus Frencken, Oleg Viacheslavovich Voznyi | 2024-01-02 |
| 11556064 | Stage apparatus and method for calibrating an object loading process | Gijs Kramer, Andre Schreuder, Anna Catharina Verkaik | 2023-01-17 |