Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386273 | Substrate holder, lithographic apparatus and method | Gijs Kramer, Ludolf POSTMA | 2025-08-12 |
| 12243768 | Substrate holder for use in a lithographic apparatus and a device manufacturing method | Johannes Josephus MAASSEN, Herman Marquart | 2025-03-04 |
| 11664264 | Lithographic apparatus, method for unloading a substrate and method for loading a substrate | Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more | 2023-05-30 |
| 11556064 | Stage apparatus and method for calibrating an object loading process | Gijs Kramer, Theodorus Marcus Nagtegaal, Anna Catharina Verkaik | 2023-01-17 |
| 8937707 | Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring system | Maarten Jozef Jansen | 2015-01-20 |
| 8289498 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Petrus Rutgerus Bartray, Leon Martin Levasier, Bernardus Antonius Johannes Luttikhuis, Josephus Jacobus Smits +7 more | 2012-10-16 |
| 8111377 | Lithographic apparatus with an encoder arranged for defining a zero level | Suzanne Johanna Antonetta Geertruda Cosijns | 2012-02-07 |
| 7417710 | Lithographic apparatus and device manufacturing method | — | 2008-08-26 |