| 12242200 |
Lithography apparatus and a method of manufacturing a device |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Jorge Alberto Vieyra Salas +3 more |
2025-03-04 |
| 12072636 |
Fluid handling system and lithographic apparatus |
Koen Steffens, Ronald Van Der Ham, Gerben Pieterse, Erik Henricus Egidius Catharina Eummelen, Francis Fahrni |
2024-08-27 |
| 11860546 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Floor Lodewijk Keukens, Gheorghe Tanasa, Rogier Hendrikus Magdalena Cortie +8 more |
2024-01-02 |
| 11809086 |
Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus |
Raphael Nico Johan Stegen, Giovanni Luca Gattobigio |
2023-11-07 |
| 11774857 |
Lithography apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Jorge Alberto Vieyra Salas +3 more |
2023-10-03 |
| 11720032 |
Process tool and an inspection method |
Raphael Nico Johan Stegen, Erik Henricus Egidius Catharina Eummelen, Christianus Wilhelmus Johannes Berendsen, Giovanni Luca Gattobigio |
2023-08-08 |
| 11614689 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more |
2023-03-28 |
| 11454892 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Floor Lodewijk Keukens, Gheorghe Tanasa, Rogier Hendrikus Magdalena Cortie +8 more |
2022-09-27 |
| 11372336 |
Lithography apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Jorge Alberto Vieyra Salas +3 more |
2022-06-28 |
| 11231653 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more |
2022-01-25 |
| 11156921 |
Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure |
Raphael Nico Johan Stegen, Giovanni Luca Gattobigio |
2021-10-26 |
| 11143969 |
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus |
Giovanni Luca Gattobigio, Nirupam Banerjee, Johan Franciscus Maria Beckers, Erik Henricus Egidius Catharina Eummelen, Ronald Frank KOX +4 more |
2021-10-12 |
| 11086239 |
Cleaning device and method of cleaning |
Miao Yu, Petrus Martinus Gerardus Johannes Arts, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Maarten Holtrust +3 more |
2021-08-10 |
| 11029607 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Floor Lodewijk Keukens, Gheorghe Tanasa, Rogier Hendrikus Magdalena Cortie +8 more |
2021-06-08 |
| 10969695 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more |
2021-04-06 |
| 10571810 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more |
2020-02-25 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2019-11-19 |
| 10416571 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more |
2019-09-17 |
| 10324384 |
Lithographic apparatus and a method of manufacturing a lithographic apparatus |
Gerben Pieterse, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Theodorus Marinus Modderman, Cornelius Maria Rops +3 more |
2019-06-18 |
| 10317804 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more |
2019-06-11 |
| 10222707 |
Lithographic apparatus and a device manufacturing method |
Henrikus Herman Marie Cox, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2019-03-05 |
| 10001712 |
Immersion lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman, Cornelius Maria Rops +3 more |
2018-06-19 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2018-03-13 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2017-10-10 |
| 9274436 |
Lithographic apparatus and a device manufacturing method |
Henrikus Herman Marie Cox, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2016-03-01 |