| 11550227 |
Projection system and lithographic apparatus comprising said projection system |
Marinus Engelbertus Cornelis MUTSAERS, Jeroen Pieter Starreveld |
2023-01-10 |
| 10248027 |
Projection system |
Hans Butler, Raoul Maarten Simon Knops, Bob Streefkerk, Christiaan Louis Valentin, Jan Bernard Plechelmus Van Schoot +4 more |
2019-04-02 |
| 9857698 |
Lithographic apparatus and device manufacturing method |
Leon Leonardus Franciscus Merkx, Roel Johannes Elisabeth Merry |
2018-01-02 |
| 9304404 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus |
Juergen Fischer, Ulrich Schoenhoff, Bernhard Geuppert, Hans Butler |
2016-04-05 |
| 9164401 |
Projection system and lithographic apparatus |
Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Hans Butler, Jan Bernard Plechelmus Van Schoot, Timotheus Franciscus Sengers +2 more |
2015-10-20 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more |
2015-09-01 |
| 8908144 |
Lithographic apparatus and device manufacturing method |
Rogier Herman Mathijs Groeneveld, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Bastiaan Stephanus Hendricus Jansen, Marc Wilhelmus Maria Van Der Wijst +1 more |
2014-12-09 |
| 8144310 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more |
2012-03-27 |
| 7307262 |
Lithographic apparatus and device manufacturing method |
Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Jacob Kleijn, Bastiaan Stephanus Hendricus Jansen, Marc Wilhelmus Maria Van Der Wijst |
2007-12-11 |
| 7224428 |
Lithographic apparatus and device manufacturing method |
Petrus Marinus Christianus Maria Van Den Biggelaar, Thomas Augustus Mattaar, Jan Van De Ven |
2007-05-29 |
| 6992752 |
Lithographic projection apparatus, computer program for control thereof, and device manufacturing method |
— |
2006-01-31 |