Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156924 | Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Antonius Franciscus Johannes De Groot, Johannes Adrianus Cornelis Maria Pijnenburg | 2021-10-26 |