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Method and device for grooving wafers |
Guido Knippels |
2019-07-02 |
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Sensor, object positioning system, lithographic apparatus and device manufacturing method |
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2018-08-28 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
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2018-05-29 |
| 9897926 |
Stage positioning system and lithographic apparatus |
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2018-02-20 |
| 9785060 |
Stage system and lithographic apparatus comprising such stage system |
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2017-10-10 |
| 9726985 |
Stage system and a lithographic apparatus |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs |
2017-08-08 |
| 9383659 |
Positioning system, lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Andre Bernardus Jeunink, Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Henricus Martinus Johannes Van De Groes +1 more |
2016-07-05 |
| 9360774 |
Lithographic apparatus with a deformation sensor |
Johannes Hendrikus Maria Spruit, Ruud Antonius Catharina Maria Beerens, Cristian Dan |
2016-06-07 |
| 8232628 |
Method for manufacturing a microelectronic package comprising at least one microelectronic device |
Paulus Martinus Catharina Hesen, Antonius J. G. M. van den Berk |
2012-07-31 |
