Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren, George Alois Leonie Leenknegt +6 more | 2018-08-28 |
| 9921494 | Lithographic apparatus comprising an actuator, and method for protecting such actuator | Theodorus Petrus Maria Cadee, Sven Antoin Johan Hol, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2018-03-20 |
| 9910367 | Lithographic apparatus, method for positioning an object in a lithographic apparatus and device manufacturing method | — | 2018-03-06 |
| 9389518 | Stage system and a lithographic apparatus | Antonius Franciscus Johannes De Groot, Raymond Wilhelmus Louis Lafarre, Yang-Shan Huang, Peter Laurentius Maria Ros | 2016-07-12 |
| 9174425 | Apparatus and method for laminating a first and a second sheet | Jeroen Van Den Brand, Andreas Heinrich Dietzel, Milan Saalmink | 2015-11-03 |
| 8980025 | Method and apparatus for laminating a first and a second sheet | Jeroen Van Den Brand, Milan Saalmink, Andreas Heinrich Dietzel, Andreas Tanda | 2015-03-17 |
| 8256912 | High positioning reproducible low torque mirror-actuator interface | Herman Soemers, Franciskus Hendrikus van Deuren, Hendrik Dirk Visser | 2012-09-04 |
| 7699480 | High positioning reproducible low torque mirror-actuator interface | Herman Soemers, Franciskus Hendrikus van Deuren, Hendrik Dirk Visser | 2010-04-20 |
| 7604359 | High positioning reproducible low torque mirror-actuator interface | Herman Soemers, Franciskus Hendrikus van Deuren, Hendrik Dirk Visser | 2009-10-20 |