Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346032 | System, lithographic apparatus and method | Ruud Hendrikus Martinus Johannes Bloks, Alexandrios Mathew, Ron Vennix | 2025-07-01 |
| 10114298 | Conditioning system and lithographic apparatus comprising a conditioning system | Jan Steven Christiaan Westerlaken, Alexandrios Mathew | 2018-10-30 |
| 10095130 | Lithographic apparatus and method in a lithographic process | Johannes Pieter Kroes, Kevin Nicolas Stephan Couteau, Rachid El Boubsi, Patrick Johannes Cornelus Hendrik Smulders, Martijn Lambertus Peter Visser +1 more | 2018-10-09 |
| 9785060 | Stage system and lithographic apparatus comprising such stage system | Ruud Antonius Catharina Maria Beerens, Jan Steven Christiaan Westerlaken, Koen Jacobus Johannes Maria Zaal, Richard Henricus Adrianus Van Lieshout, Engelbertus Antonius Fransiscus Van Der Pasch | 2017-10-10 |