Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095130 | Lithographic apparatus and method in a lithographic process | Johannes Pieter Kroes, Kevin Nicolas Stephan Couteau, Rachid El Boubsi, Rob Johan Theodoor Rutten, Martijn Lambertus Peter Visser +1 more | 2018-10-09 |
| 8860926 | Lithographic apparatus and device manufacturing method | Pieter Renaat Maria Hennus, Jeroen Johannes Sophia Maria Mertens, Peter Smits | 2014-10-14 |
| 8390778 | Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing | Peter Smits | 2013-03-05 |
| 8115905 | Lithographic apparatus and device manufacturing method | Pieter Renaat Maria Hennus, Jeroen Johannes Sophia Maria Mertens, Peter Smits | 2012-02-14 |
| 7684010 | Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing | Peter Smits | 2010-03-23 |
| 7583357 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Peter Smits | 2009-09-01 |
| 7486384 | Lithographic support structure | Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp +8 more | 2009-02-03 |
| 7365827 | Lithographic apparatus and device manufacturing method | Pieter Renaat Maria Hennus, Jeroen Johannes Sophia Maria Mertens, Peter Smits | 2008-04-29 |
| 7272082 | Optical scanning device comprising a tiltable lens system | Jan W. Aarts | 2007-09-18 |