Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11669021 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2023-06-06 |
| 11275316 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2022-03-15 |
| 11150560 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst | 2021-10-19 |
| 10761433 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2020-09-01 |
| 10732511 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst | 2020-08-04 |
| 10222711 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2019-03-05 |
| 10216093 | Projection system and minor and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst | 2019-02-26 |
| 9851644 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2017-12-26 |
| 9785060 | Stage system and lithographic apparatus comprising such stage system | Ruud Antonius Catharina Maria Beerens, Rob Johan Theodoor Rutten, Jan Steven Christiaan Westerlaken, Richard Henricus Adrianus Van Lieshout, Engelbertus Antonius Fransiscus Van Der Pasch | 2017-10-10 |
| 9618859 | Lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Jan Bernard Plechelmus Van Schoot, Theodorus Petrus Maria Cadee | 2017-04-11 |
| 9581916 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders | 2017-02-28 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |
| 9470969 | Support, lithographic apparatus and device manufacturing method | Theodorus Petrus Maria Cadee, Harmeet Singh | 2016-10-18 |
| 9436096 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2016-09-06 |
| 9195150 | Lithographic apparatus comprising a support for holding an object, and a support for use therein | Theodorus Petrus Maria Cadee, Vadim Yevgenyevich Banine, Ramin Badie, Harmeet Singh | 2015-11-24 |
| 9188882 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders | 2015-11-17 |
| 8947631 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2015-02-03 |
| 8947636 | Lithographic apparatus, device manufacturing method, and substrate exchanging method | Theodorus Petrus Maria Cadee, Jan Jaap Kuit, Johannes Catharinus Hubertus Mulkens | 2015-02-03 |
| 8941810 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2015-01-27 |
| 8749754 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Minne Cuperus | 2014-06-10 |
| 8743339 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2014-06-03 |
| 8616598 | Apparatus and method for contactless handling of an object | Theodorus Petrus Maria Cadee, Timo Hol, Michael Wilhelmus Theodorus Koot | 2013-12-31 |
| 8553201 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Minne Cuperus | 2013-10-08 |
| 8514365 | Lithographic apparatus and device manufacturing method | Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more | 2013-08-20 |
| 8457385 | Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object | Marc Wilhelmus Maria Van Der Wijst, Engelbertus Antonius Fransiscus Van Der Pasch | 2013-06-04 |