Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7903866 | Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object | Marc Wilhelmus Maria Van Der Wijst, Engelbertus Antonius Fransiscus Van Der Pasch | 2011-03-08 |
| 7804582 | Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Judocus Marie Dominicus Stoeldraijer, Antonius Johannes De Kort, Franciscus Van De Mast, Marteijn De Jong | 2010-09-28 |
| 7746447 | Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus | Johannes Henricus Wilhelmus Jacobs, Erik Roelof Loopstra, Joost Jeroen Ottens, Frederik Eduard De Jong | 2010-06-29 |
| 7671963 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Minne Cuperus | 2010-03-02 |
| 7649611 | Lithographic apparatus and device manufacturing method | Jeroen Joost Ottens | 2010-01-19 |
| 7528935 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Tjarko Adriaan Rudolf Van Empel, Hendricus Johannes Maria Meijer, Joost Jeroen Ottens, Marco Le Kluse, Jan Hopman | 2009-05-05 |
| 7492440 | Lithographic apparatus and device manufacturing method | Edwin Johan Buis, Henrikus Herman Marie Cox, Noud Jan Gilissen, Harmen Klaas Van Der Schoot | 2009-02-17 |
| 7486381 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Minne Cuperus | 2009-02-03 |
| 7426011 | Method of calibrating a lithographic apparatus and device manufacturing method | Antonius Johannes De Kort, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov, Hermen Folken Pen | 2008-09-16 |
| 7423725 | Lithographic method | Antonius Johannes De Kort, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov, Hermen Folken Pen | 2008-09-09 |
| 7411657 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders | 2008-08-12 |
| 7327438 | Lithographic apparatus and method of a manufacturing device | Tjarko Adriaan Rudolf Van Empel, Aschwin Lodewijk Hendricus Johannes Van Meer, Jan Rein Miedema, Joost Jeroen Ottens | 2008-02-05 |
| 7327437 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox | 2008-02-05 |
| 7327439 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Jan Hopman | 2008-02-05 |
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Rene Oesterholt, Ralph Brinkhof, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Joost Jeroen Ottens +1 more | 2007-07-03 |
| 7230254 | Movable carriage for a lithographic apparatus and device manufacturing method | Martinus Arnoldus Henricus Terken, Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters | 2007-06-12 |
| 7227619 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Joost Jeroen Ottens | 2007-06-05 |
| 7187433 | Electrostatic clamp assembly for a lithographic apparatus | Joost Jeroen Ottens, Hendrik Antony Johannes Neerhof, Marco Le Kluse | 2007-03-06 |
| 7161662 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Joost Jeroen Ottens, Tjarko Adriaan Rudolf Van Empel | 2007-01-09 |
| 7145269 | Lithographic apparatus, Lorentz actuator, and device manufacturing method | Sven Antoin Johan Hol, Henrikus Herman Marie Cox, Hernes Jacobs, Patricia Vreugdewater | 2006-12-05 |
| 7133120 | Lithographic apparatus, article support member, and method | Aschwin Lodewijk Hendricus Johannes Van Meer, Joost Jeroen Ottens | 2006-11-07 |
| 7119885 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Tjarko Adriaan Rudolf Van Empel, Aschwin Lodewijk Hendricus Johannes Van Meer, Jan Rein Miedema | 2006-10-10 |
| 7113262 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Tjarko Adriaan Rudolf Van Empel, Aschwin Lodewijk Hendricus Johannes Van Meer, Ton Aantjes | 2006-09-26 |
| 7110085 | Lithographic apparatus, substrate holder and method of manufacturing | Tjarko Adriaan Rudolf Van Empel, Joost Jeroen Ottens | 2006-09-19 |
| 7110091 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Tjarko Adriaan Rudolf Van Empel, Joost Jeroen Ottens, Jan Hopman | 2006-09-19 |