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Lithographic apparatus and device manufacturing method involving a heater |
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2022-07-05 |
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Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2020-11-17 |
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Illumination system, inspection tool with illumination system, and method of operating an illumination system |
Filip Cauwenberghs, Johan DeGreeve, Pauline Begoc |
2019-08-13 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Boris Menchtchikov |
2008-11-18 |
| 7426011 |
Method of calibrating a lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Antonius Johannes De Kort, Frederik Eduard De Jong, Boris Menchtchikov, Hermen Folken Pen |
2008-09-16 |
| 7423725 |
Lithographic method |
Koen Jacobus Johannes Maria Zaal, Antonius Johannes De Kort, Frederik Eduard De Jong, Boris Menchtchikov, Hermen Folken Pen |
2008-09-09 |
| 7304715 |
Lithographic apparatus and device manufacturing method |
Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Boris Menchtchikov +6 more |
2007-12-04 |
| 7196768 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederik Eduard De Jong, Boris Menchtchikov, Edwin Augustinus Matheus Van Gompel |
2007-03-27 |