Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7453063 | Calibration substrate and method for calibrating a lithographic apparatus | Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Koen Goorman, Boris Menchtchikov | 2008-11-18 |
| 7304715 | Lithographic apparatus and device manufacturing method | Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Koen Goorman, Boris Menchtchikov +6 more | 2007-12-04 |