Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11237490 | Lithographic apparatus and device manufacturing method | Bearrach Moest, Lowell Lane Baker, James Robert DOWNES, Wijnand Hoitinga | 2022-02-01 |
| 11009800 | Measurement system, lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Günes NAKIBOGLU, Rita Marguerite Albin Lambertine Petit, Remco Yuri Van De Moesdijk, Frank Johannes Jacobus Van Boxtel +1 more | 2021-05-18 |
| 8345231 | Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process | Nilay Saha | 2013-01-01 |
| 7426011 | Method of calibrating a lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Antonius Johannes De Kort, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov | 2008-09-16 |
| 7423725 | Lithographic method | Koen Jacobus Johannes Maria Zaal, Antonius Johannes De Kort, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov | 2008-09-09 |