Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8345231 | Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process | Hermen Folken Pen | 2013-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8345231 | Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process | Hermen Folken Pen | 2013-01-01 |