Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11237490 | Lithographic apparatus and device manufacturing method | Bearrach Moest, James Robert DOWNES, Wijnand Hoitinga, Hermen Folken Pen | 2022-02-01 |
| 10642166 | Patterning device cooling apparatus | Güneş Nakibo{hacek over (g)}lu, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2020-05-05 |
| 10585359 | Membrane assembly and particle trap | Ronald Peter Albright, Daniel Nathan Burbank | 2020-03-10 |
| 10394139 | Patterning device cooling apparatus | Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2019-08-27 |