Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7804582 | Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens, Judocus Marie Dominicus Stoeldraijer, Franciscus Van De Mast, Marteijn De Jong | 2010-09-28 |
| 7652749 | Software upgrades in a lithographic apparatus | Andre Bernardus Jeunink | 2010-01-26 |
| 7426011 | Method of calibrating a lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov, Hermen Folken Pen | 2008-09-16 |
| 7423725 | Lithographic method | Koen Jacobus Johannes Maria Zaal, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov, Hermen Folken Pen | 2008-09-09 |