Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8476167 | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus | Hubert Adriaan Van Mierlo, Erik Ham, Hendricus Johannes Maria Meijer, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens +3 more | 2013-07-02 |
| 7528935 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Hendricus Johannes Maria Meijer, Joost Jeroen Ottens, Marco Le Kluse | 2009-05-05 |
| 7327439 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens | 2008-02-05 |
| 7110091 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Joost Jeroen Ottens | 2006-09-19 |
| 6290275 | Robotically drivable interface mechanism | Bernardus Carolus Braam | 2001-09-18 |
| 5663486 | Mechanical linear guide | Bernardus Carolus Braam, Marinus P. Koster | 1997-09-02 |