Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8961694 | Plasma generator and method for cleaning an object | Fokko Pieter Wieringa, Norbertus Benedictus Koster, Roland van Vliet | 2015-02-24 |
| 8476167 | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus | Erik Ham, Hendricus Johannes Maria Meijer, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Johannes Adrianus Petrus Leijtens +3 more | 2013-07-02 |
| 8164077 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Marco Wedowski, Markus Weiss, Stephan Muellender, Johann Trenkler, Hartmut Enkisch +3 more | 2012-04-24 |
| 7781237 | Alignment marker and lithographic apparatus and device manufacturing method using the same | Gert-Jan Heerens, Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Willem Vliegenthart | 2010-08-24 |
| 7522263 | Lithographic apparatus and method | Gert-Jan Heerens, Hans Meiling, Antonius Gerardus Theodorus Maria Bastein, Jacques Cor Johan Van Der Donck, Hedser Van Brug | 2009-04-21 |
| 7480028 | Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program | Michael Van Der Veen, Anastasius Jacobus Anicetus Bruinsma, Henricus Wilhelmus Maria Van Buel, Jacob Klinkhamer, Martinus Hendrikus Antonius Leenders +1 more | 2009-01-20 |
| 7177009 | Position determination method and lithographic apparatus | Jacob F. F. Klinkhamer, Anastasius Jacobus Anicetus Bruinsma, Martinus Hendrikus Antonius Leenders | 2007-02-13 |