Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8476167 | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus | Hubert Adriaan Van Mierlo, Erik Ham, Hendricus Johannes Maria Meijer, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens +3 more | 2013-07-02 |
| 8249809 | Star tracker with baffle | — | 2012-08-21 |