| 8476167 |
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus |
Hubert Adriaan Van Mierlo, Hendricus Johannes Maria Meijer, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Johannes Adrianus Petrus Leijtens +3 more |
2013-07-02 |
| 7248340 |
Lithographic apparatus and patterning device transport |
Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling, Bastiaan Mertens +2 more |
2007-07-24 |
| 7202934 |
Lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Gert-Jan Heerens, Paulus Martinus Maria Liebregts, Erik Roelof Loopstra, Henri Gerard Cato Werij |
2007-04-10 |
| 7153612 |
Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured thereby |
Gart-Jan Heerens, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2006-12-26 |
| 7151589 |
Lithographic apparatus and patterning device transport |
Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Ellard Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling +2 more |
2006-12-19 |
| 7123344 |
Lithographic apparatus and device manufacturing method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2006-10-17 |
| 6781673 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more |
2004-08-24 |
| 6753945 |
Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method |
Gert-Jan Heerens, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Robert Gabriël Maria Lansbergen |
2004-06-22 |