Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8633460 | Reflective optical element, optical system EUV and lithography device | — | 2014-01-21 |
| 8164077 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Markus Weiss, Stephan Muellender, Johann Trenkler, Hartmut Enkisch, Gisela Sipos +3 more | 2012-04-24 |
| 8003960 | Reflective optical element, optical system and EUV lithography device | — | 2011-08-23 |
| 7646004 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Markus Weiss, Stephan Müllender, Johann Trenkler, Hartmut Enkisch, Gisela Sipos +3 more | 2010-01-12 |
| 7623620 | Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nm | Hans-Jurgen Mann, Udo Dinger, Wilhelm Ulrich, Wolfgang Reinecke, Thomas Engel +3 more | 2009-11-24 |
| 7462842 | Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements | Frank Stietz, Bas Mertens, Roman Klein | 2008-12-09 |
| 7172788 | Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device | Andrey E. Yakshin, Eric Louis, Frederik Bijkerk, Roman Klein, Frank Stietz | 2007-02-06 |
| 7154666 | Narrow-band spectral filter and the use thereof | — | 2006-12-26 |
| 7060993 | Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements | Frank Stietz, Bas Mertens, Roman Klein | 2006-06-13 |