Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7646004 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Marco Wedowski, Markus Weiss, Johann Trenkler, Hartmut Enkisch, Gisela Sipos +3 more | 2010-01-12 |