Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7623620 | Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nm | Hans-Jurgen Mann, Udo Dinger, Wilhelm Ulrich, Thomas Engel, Axel Zibold +3 more | 2009-11-24 |
| 6801373 | Projection lens | Horst Linge | 2004-10-05 |
| 6795255 | Projection objective | Horst Linge | 2004-09-21 |
| 6785305 | Tuneable, adjustment-stable semiconductor laser light source and a method for the optically stable, largely continuous tuning of semiconductor lasers | Manfred Gabbert | 2004-08-31 |