Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8730474 | Method and apparatus for measuring of masks for the photo-lithography | Thomas Scheruebl, Holger Seitz, Ulrich Matejka, Rigo Richter | 2014-05-20 |
| 8705838 | Method for mask inspection for mask design and mask production | Klaus Boehm, Christian Kalus, Thomas Schmoeller, Wolfgang Harnisch | 2014-04-22 |
| 8268516 | Method for repairing phase shift masks | Peter Kuschnerus, Oliver Kienzle | 2012-09-18 |
| 7916930 | Method and arrangement for repairing photolithography masks | Wolfgang Harnisch, Oliver Kienzle | 2011-03-29 |
| 7623620 | Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nm | Hans-Jurgen Mann, Udo Dinger, Wilhelm Ulrich, Wolfgang Reinecke, Thomas Engel +3 more | 2009-11-24 |