Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8875066 | Performing image calculation based on spatial coherence | Yongfa Fan | 2014-10-28 | $4,971,000 |
| 8705838 | Method for mask inspection for mask design and mask production | Klaus Boehm, Christian Kalus, Wolfgang Harnisch, Axel Zibold | 2014-04-22 | $1,490,000 |