Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8731273 | Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section | Michael Arnz, Dirk Beyer, Thomas Scheruebl | 2014-05-20 |
| 8705838 | Method for mask inspection for mask design and mask production | Klaus Boehm, Christian Kalus, Thomas Schmoeller, Axel Zibold | 2014-04-22 |
| RE44216 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker +3 more | 2013-05-14 |
| 7916930 | Method and arrangement for repairing photolithography masks | Axel Zibold, Oliver Kienzle | 2011-03-29 |
| 7623620 | Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nm | Hans-Jurgen Mann, Udo Dinger, Wilhelm Ulrich, Wolfgang Reinecke, Thomas Engel +3 more | 2009-11-24 |
| 7525115 | Arrangement for inspecting objects, especially masks in microlithography | Hans-Juergen Dobschal, Thomas Scheruebl, Nobert Rosenkranz, Ralph Semmler | 2009-04-28 |
| 7286284 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker +3 more | 2007-10-23 |
| 7167310 | Microscope, especially microscope used for inspection in semiconductor manufacture | Thomas Engel, Roland Scheler | 2007-01-23 |
| 6925225 | Device for flat illumination of an object field | Thomas Engel, Juergen Heise | 2005-08-02 |