Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525115 | Arrangement for inspecting objects, especially masks in microlithography | Hans-Juergen Dobschal, Wolfgang Harnisch, Thomas Scheruebl, Ralph Semmler | 2009-04-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525115 | Arrangement for inspecting objects, especially masks in microlithography | Hans-Juergen Dobschal, Wolfgang Harnisch, Thomas Scheruebl, Ralph Semmler | 2009-04-28 |