Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916356 | Reflective optical element | Dmitry Kuznetsov, Hartmut Enkisch, Viacheslav Medvedev, Frederik Bijkerk | 2021-02-09 |
| 8475635 | Processes and device for the deposition of films on substrates | Wolfgang Fukarek | 2013-07-02 |
| 8144830 | Reflective optical element for EUV lithography device | Robbert W. E. Van De Kruijs, Fred Bijkerk, Eric Louis, Ileana Nedelcu | 2012-03-27 |
| 8025777 | Processes and device for the deposition of films on substrates | Wolfgang Fukarek | 2011-09-27 |
| 7261957 | Multilayer system with protecting layer system and production method | Frederik Bijkerk, Eric Louis, Peter Gorts, Sebastian Oestreich, Lambertus Gerhardus Albertus Michael Alink +2 more | 2007-08-28 |
| 7172788 | Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device | Eric Louis, Frederik Bijkerk, Marco Wedowski, Roman Klein, Frank Stietz | 2007-02-06 |
| 6656575 | Multilayer system with protecting layer system and production method | Frederik Bijkerk, Eric Louis, Peter Gorts, Sebastian Oestreich | 2003-12-02 |
| 6483597 | Method for the production of multi-layer systems | Eric Louis, Frederik Bijkerk | 2002-11-19 |