Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7462842 | Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements | Marco Wedowski, Bas Mertens, Roman Klein | 2008-12-09 |
| 7172788 | Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device | Andrey E. Yakshin, Eric Louis, Frederik Bijkerk, Marco Wedowski, Roman Klein | 2007-02-06 |
| 7060993 | Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements | Marco Wedowski, Bas Mertens, Roman Klein | 2006-06-13 |