Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7462842 | Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements | Marco Wedowski, Frank Stietz, Roman Klein | 2008-12-09 |
| 7060993 | Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements | Marco Wedowski, Frank Stietz, Roman Klein | 2006-06-13 |