Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916356 | Reflective optical element | Dmitry Kuznetsov, Andrey E. Yakshin, Hartmut Enkisch, Frederik Bijkerk | 2021-02-09 |
| 9411238 | Source-collector device, lithographic apparatus, and device manufacturing method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more | 2016-08-09 |
| 9366967 | Radiation source | Andrei Mikhailovich Yakunin, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Gerardus Hubertus Petrus Maria Swinkels, Jan Bernard Plechelmus Van Schoot | 2016-06-14 |
| 9007565 | Spectral purity filter | Andrei Mikhailovich Yakunin, Vladimir Mihailovitch Krivtsun, Alexandre Kodentsov | 2015-04-14 |