Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733580 | Method for producing a reflective optical element for EUV-lithography | Alexey Kuznetzov, Michael Gleeson, Frederik Bijkerk | 2017-08-15 |
| 8144830 | Reflective optical element for EUV lithography device | Andrey E. Yakshin, Fred Bijkerk, Eric Louis, Ileana Nedelcu | 2012-03-27 |
| 7261957 | Multilayer system with protecting layer system and production method | Frederik Bijkerk, Eric Louis, Andrey E. Yakshin, Peter Gorts, Sebastian Oestreich +2 more | 2007-08-28 |