Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003088 | Method and device for the correction of imaging defects | Franz Sorg, Toralf Gruner | 2021-05-11 |
| 10620543 | Method and device for the correction of imaging defects | Franz Sorg, Toralf Gruner | 2020-04-14 |
| 10571813 | Connection arrangement for a force-fit connection between ceramic components | Karsten Siegmanski, Viktor Kulitzki, Stefan Xalter, Bernhard Gellrich | 2020-02-25 |
| 10108094 | Projection exposure apparatus with near-field manipulator | Johannes Lippert, Pascal Marsollek, Jasper Wesselingh, Yim-Bun Patrick Kwan | 2018-10-23 |
| 9551944 | Method for replacing objective parts | Bernhard Geuppert, Guido Limbach, Harald Woelfle | 2017-01-24 |
| 9298111 | Optical arrangement in a projection exposure apparatus for EUV lithography | Viktor Kulitzki, Bernhard Gellrich, Stefan Xalter, Yim-Bun Patrick Kwan, Andreas Wurmbrand | 2016-03-29 |
| 8159648 | Method and device for the correction of imaging defects | Franz Sorg, Toralf Gruner | 2012-04-17 |
| 8018664 | Housing structure | Stefan Xalter, Yim-Bun Patrick Kwan, Bernard Stommen, Herman Soemers, Franz Van Deuren +1 more | 2011-09-13 |
| 7986472 | Optical element module | Jens Kugler, Ulrich Weber, Bernhard Gellrich, Yim-Bun Patrick Kwan | 2011-07-26 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg +7 more | 2010-05-25 |