Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394747 | Curved wafer stage | Joep Stokkermans, Gijs van der Veen, Patrick Houben | 2025-08-19 |
| 11656453 | Optical imaging arrangement with a piezoelectric device | Yim-Bun Patrick Kwan, Axel Lorenz | 2023-05-23 |
| 11156925 | Positioning system for a lithographic apparatus | Maarten Hartger Kimman | 2021-10-26 |
| 10732402 | Optical imaging arrangement with a piezoelectric device | Yim-Bun Patrick Kwan, Axel Lorenz | 2020-08-04 |
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Michael Erath, Ansgar Holle, Stefan Troeger, Alexander Vogler | 2020-02-25 |
| 10274846 | Electromagnetic drive comprising a stator and a stator holder | Axel Lorenz | 2019-04-30 |
| 10108094 | Projection exposure apparatus with near-field manipulator | Peter Deufel, Johannes Lippert, Pascal Marsollek, Yim-Bun Patrick Kwan | 2018-10-23 |
| 10025200 | Optimum arrangement of actuator and sensor points on an optical element | Pascal Marsollek, Johannes Lippert, Sascha Bleidistel | 2018-07-17 |
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Florian Bach, Ulrich Schoenhoff, Rodolfo Rabe, Norbert Muehlberger +1 more | 2016-09-20 |