Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169359 | Method for positioning a component of an optical system | Stefan Hembacher | 2021-11-09 |
| 10386732 | Bearing assembly for a lithography system, and lithography system | — | 2019-08-20 |
| 10108094 | Projection exposure apparatus with near-field manipulator | Peter Deufel, Johannes Lippert, Jasper Wesselingh, Yim-Bun Patrick Kwan | 2018-10-23 |
| 10025200 | Optimum arrangement of actuator and sensor points on an optical element | Johannes Lippert, Jasper Wesselingh, Sascha Bleidistel | 2018-07-17 |