Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11268269 | Sanitary installation | Thomas STAMMEL, Thomas Konstanzer | 2022-03-08 |
| 10969699 | Projection lighting system for semiconductor lithography with an improved heat transfer | Willi Anderl | 2021-04-06 |
| 10777958 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl +3 more | 2020-09-15 |
| 10215948 | Optical element module with minimized parasitic loads | Jens Kugler, Dirk Schaffer | 2019-02-26 |
| 10146048 | Optical assembly, projection system, metrology system and EUV lithography apparatus | Michael James Brehm, Wolfgang Merkel, Henry Wegert | 2018-12-04 |
| 10133021 | Positioning unit and apparatus for adjustment of an optical element | Jens Kugler | 2018-11-20 |
| 9843153 | Beam reverser module and optical power amplifier having such a beam reverser module | Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl +3 more | 2017-12-12 |
| 9766550 | Actuators and microlithography projection exposure systems and methods using the same | Stefan Hembacher, Armin Schoeppach | 2017-09-19 |
| 9709895 | Support elements for an optical element | Jens Kugler, Nicolai Wengert | 2017-07-18 |
| 9664873 | Positioning unit and apparatus for adjustment of an optical element | Jens Kugler | 2017-05-30 |
| 9516976 | Sanitary facility comprising a washstand and a support cabinet | Thomas STAMMEL, Erich Fuhrer | 2016-12-13 |
| 9127433 | Formwork element | Magnus Kloster, Klaus Meyer | 2015-09-08 |
| 9075174 | Positioning unit and apparatus for adjustment of an optical element | Jens Kugler | 2015-07-07 |
| 8988654 | Support elements for an optical element | Jens Kugler, Nicolai Wengert | 2015-03-24 |
| 8793862 | Water-tight membrane | Magnus Kloster | 2014-08-05 |
| 8760777 | Positioning unit and apparatus for adjustment of an optical element | Jens Kugler | 2014-06-24 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Loering, Dirk Hellweg +7 more | 2014-02-25 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Loering, Dirk Hellweg +7 more | 2013-09-24 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 8508868 | Holding arrangement for an optical element | Armin Schoeppach, Hubert Holderer | 2013-08-13 |
| 8493674 | Positioning unit and alignment device for an optical element | Jens Kugler | 2013-07-23 |
| 8456771 | Holding arrangement for an optical element | Hubert Holderer | 2013-06-04 |
| 8416515 | Positioning unit and alignment device for an optical element | Jens Kugler | 2013-04-09 |
| 8351139 | Optical element module with minimized parasitic loads | Jens Kugler, Dirk Schaffer | 2013-01-08 |
| 8035903 | Positioning unit and alignment device for an optical element | Jens Kugler | 2011-10-11 |