Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027024 | Replacement device for an optical element | Bernhard Gellrich | 2011-09-27 |
| 7986472 | Optical element module | Jens Kugler, Bernhard Gellrich, Yim-Bun Patrick Kwan, Peter Deufel | 2011-07-26 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Bernhard Geuppert +8 more | 2010-07-20 |
| 7738193 | Positioning unit and alignment device for an optical element | Jens Kugler | 2010-06-15 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7564636 | Device for preventing the displacement of an optical element | Christian Zengerling, Armin Schoeppach | 2009-07-21 |
| 7515359 | Support device for positioning an optical element | Jens Kugler, Sabine Hafenrichter | 2009-04-07 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7482605 | Energy filter device | Gerhard Kraft, Sebastian Kraft, Stephan Kraft | 2009-01-27 |
| 7362520 | Device for the low-deformation mounting of a rotationally asymmetric optical element | — | 2008-04-22 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |
| 7251086 | Apparatus for positioning an optical element in a structure | Hubert Holderer, Dirk Rexhaeuser | 2007-07-31 |
| 7242537 | Holding and positioning apparatus for an optical element | Hubert Holderer | 2007-07-10 |
| 7239462 | Objective with at least one optical element | Johannes Rau, Armin Schoeppach | 2007-07-03 |
| 7079331 | Device for holding a beam splitter element | Alexander Kohl, Hubert Holderer, Armin Schoeppach, Erwin Gaber, Winfried Kaiser +5 more | 2006-07-18 |
| 7014328 | Apparatus for tilting a carrier for optical elements | Hubert Holderer, Alexander Kohl | 2006-03-21 |
| 6967792 | Apparatus for positioning an optical element in a structure | Hubert Holderer, Dirk Rexhaeuser | 2005-11-22 |
| 6891177 | Ion beam scanner system and operating method | Gerhard Kraft | 2005-05-10 |
| 6842294 | Catadioptric objective | Hubert Holderer, Alexander Kohl, Toralf Gruner, Christoph Zaczek, Jens Ullmann +3 more | 2005-01-11 |
| 6744574 | Mount for an optical element in an optical imaging device | Jochen Becker, Hubert Holderer, Bernhard Gellrich, Jens Kugler | 2004-06-01 |
| 6724548 | Objective, in particular a projection lens for microlithography | — | 2004-04-20 |
| 6710362 | Device for irradiating a tumor tissue | Gerhard Kraft | 2004-03-23 |
| 6683318 | Ion beam therapy system and a method for operating the system | Thomas Haberer, Michael Kraemer, Gerhard Kraft, Wilma Kraft-Weyrather, Dieter Schardt +13 more | 2004-01-27 |
| 6271976 | Apparatus for tilting an object about at least one axis, in particular an optical element | — | 2001-08-07 |