Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703098 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle | 2017-07-11 |
| 9423695 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle | 2016-08-23 |
| 8939587 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle | 2015-01-27 |
| 8376559 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle | 2013-02-19 |
| 8092029 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle | 2012-01-10 |
| 7486382 | Imaging device in a projection exposure machine | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +11 more | 2009-02-03 |