Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529276 | Microlithography projection exposure apparatus having at least two operating states | Hans-Juergen Mann | 2016-12-27 |
| 7382536 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2008-06-03 |
| 7310187 | Projection objective, especially for microlithography, and method for adjusting a projection objective | Alexander Epple, Paul Graeupner, Reiner Garreis, Wilhelm Ulrich | 2007-12-18 |
| 7209292 | Projection objective, especially for microlithography, and method for adjusting a projection objective | Alexander Epple, Paul Graeupner, Reiner Garreis, Wilhelm Ulrich | 2007-04-24 |
| 7180667 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2007-02-20 |
| 7170585 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Alexander Kohl, Jens Kugler +2 more | 2007-01-30 |
| 7145720 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2006-12-05 |
| 7126765 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2006-10-24 |
| 7079331 | Device for holding a beam splitter element | Ulrich Weber, Alexander Kohl, Hubert Holderer, Armin Schoeppach, Erwin Gaber +5 more | 2006-07-18 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Alexander Kohl, Jens Kugler +2 more | 2005-04-12 |
| 6453005 | SiO2-coated mirror substrate for EUV | — | 2002-09-17 |
| 6252712 | Optical system with polarization compensator | Gerhard Furter, Christian Wagner, Michael Gerhard, Karl-Heinz Schuster | 2001-06-26 |
| 5697771 | Vacuum pump with oil separator | Lutz Arndt, Peter Muller | 1997-12-16 |
| 5287520 | Monitor system having list of items with fixed time slices for transmitting timing signals at the end of a communication between master processor and slave processors | — | 1994-02-15 |
| 5194988 | Device for correcting perspective distortions | Werner Flother | 1993-03-16 |
| 5178522 | Method and apparatus for supplying oil to a vacuum pump | Thomas Abelen, Lutz Arndt, Peter Muller, Dieter Vorberg | 1993-01-12 |
| 5155908 | Method for assembling a one-piece rotor system and a pump ring for a two-stage vacuum pump | Lutz Arndt, Peter Muller | 1992-10-20 |
| 5145335 | Low-noise vacuum pump | Thomas Abelen, Hans-Peter Berges, Gustav Boley | 1992-09-08 |
| 5065154 | Digitally addressble electronic device with interchanged and inverted address lines | Andreas Schober, E.-Peter Salfeld | 1991-11-12 |
| 4978276 | Pump stage for a high-vacuum pump | Hans-Peter Kabelitz, Hans-Guenter Stueber | 1990-12-18 |
| 4963076 | Radial blower with resiliently mounted bearing holders | Frank Fleischmann, Hans-Peter Kabelitz | 1990-10-16 |
| 4915194 | Lubricating oil feed system | Heinrich Engländer, Frank Fleischmann, Hans-Peter Kabelitz, Friedrich Schmaus, Gunter Schutz +2 more | 1990-04-10 |