Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11231658 | Arrangement for an EUV lithography apparatus | Holger Kierey | 2022-01-25 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Eric Eva, Ralf Winter +4 more | 2021-08-24 |
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Ralf Moser, Florian Herold, Arno Schmittner, Holger Kierey, Georgo Metalidis | 2020-03-03 |
| 10503075 | EUV Collector | Ingrid Schuster, Georgo Metalidis, Holger Kierey | 2019-12-10 |
| 10146048 | Optical assembly, projection system, metrology system and EUV lithography apparatus | Michael James Brehm, Ulrich Weber, Henry Wegert | 2018-12-04 |
| 4783564 | Method for the preparation of 1,2-dichloroethane | Bernhard Piotrowski, Roland Schildhauer, Kurt Deselaers | 1988-11-08 |
| 4369426 | Emergency distress signal system for motor vehicles | — | 1983-01-18 |
| 4346230 | Process for the preparation of dimethyl terephthalate | Gerhart Hoffmann, Rudolph Cordes | 1982-08-24 |