Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111578 | Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirror | Fabian Schuster, Holger Kierey, Andreas Sandner, Tobias Meisch | 2024-10-08 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Eric Eva, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Moritz Becker +6 more | 2020-05-12 |
| 8999187 | Method for manufacturing a device on a substrate | Sandra Obernhuber, Joerg Adler, Uwe Hoeckele, Walter Preis, Reinhard Goellner +2 more | 2015-04-07 |
| 8597531 | Method for manufacturing a device on a substrate | Sandra Obernhuber, Joerg Adler, Uwe Hoeckele, Walter Preis, Reinhard Goellner +2 more | 2013-12-03 |