Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353137 | Field facet system and lithography apparatus | Willi Anderl, Stefan Lippoldt, Joram Rosseels, Rob Janssen | 2025-07-08 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Eric Eva, Ralf Winter +4 more | 2021-08-24 |
| 10578974 | Optical element, in particular for a microlithographic projection exposure apparatus | Ralf Moser, Florian Herold, Holger Kierey, Wolfgang Merkel, Georgo Metalidis | 2020-03-03 |
| 10303067 | Cooler for use in a device in a vacuum | Willi Anderl, Bernhard Weigl, Ann-Kathrin Wandner, Holger Kierey, Markus Bauer +2 more | 2019-05-28 |
| 9903772 | Hermetic weighing cell having overload protection | Ralf Scherer | 2018-02-27 |
| 9255832 | Bending beam load cell with enclosure | Ralf Scherer | 2016-02-09 |
| 9164004 | Hermetic weighing cell having overload protection | Ralf Scherer | 2015-10-20 |