Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353137 | Field facet system and lithography apparatus | Arno Schmittner, Willi Anderl, Stefan Lippoldt, Rob Janssen | 2025-07-08 |
| 11815817 | Field facet system, optical arrangement and lithography apparatus | Guenter Rudolph | 2023-11-14 |