Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393119 | Optical system and lithography apparatus | Wolfgang Scherm | 2025-08-19 |
| 11029606 | Optical element for the beam guidance of imaging light in projection lithography | Jens Prochnau, Roman Orlik | 2021-06-08 |
| 10520838 | Mounting arrangement for an optical imaging arrangement | Jens Prochnau | 2019-12-31 |
| 10215948 | Optical element module with minimized parasitic loads | Jens Kugler, Ulrich Weber | 2019-02-26 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2019-02-12 |
| 10095126 | Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same | Jens Prochnau, Marwene Nefzi | 2018-10-09 |
| 10007186 | Optical arrangement of a microlithographic projection exposure apparatus | Jens Prochnau | 2018-06-26 |
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Andreas Wurmbrand, Bernhard Gellrich, Markus Kern | 2018-06-12 |
| 9869937 | Mirror arrangement for a lithography apparatus and method for producing the same | — | 2018-01-16 |
| 9459538 | Lithography apparatus and method for producing a mirror arrangement | Wilfried Clauss, Hin Yiu Anthony Chung | 2016-10-04 |
| 9250417 | Optical arrangement in a microlithographic projection exposure apparatus | Stefan Hembacher, Jens Kugler | 2016-02-02 |
| 9134501 | Optical element unit and method of supporting an optical element | Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner | 2015-09-15 |
| 9046795 | Optical element unit for exposure processes having sealing element | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2015-06-02 |
| 8927090 | Method for bonding bodies and composite body | Hin Yiu Anthony Chung | 2015-01-06 |
| 8848167 | Optical element for UV or EUV lithography with coatings having optimized stress and thickness | Johannes Lippert | 2014-09-30 |
| 8582081 | Device for the low-deformation replaceable mounting of an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Petasch, Siegfried Wahl | 2013-11-12 |
| 8351139 | Optical element module with minimized parasitic loads | Jens Kugler, Ulrich Weber | 2013-01-08 |
| 7471469 | Device for the low-deformation replaceable mounting of an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Petasch, Siegfried Wahl | 2008-12-30 |
| 7085080 | Low-deformation support device of an optical element | Andreas Wurmbrand, Thomas Schletterer | 2006-08-01 |