Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663873 | Mirror arrangement for microlithographic projection exposure apparatus and related method | Hermann Bieg | 2020-05-26 |
| 10133183 | Optical component | Michael Patra, Markus Deguenther, Paul Buettner, Henner Baitinger | 2018-11-20 |
| 9658542 | Optical element | Steffen Fritzsche | 2017-05-23 |
| 9134501 | Optical element unit and method of supporting an optical element | Dirk Schaffer, Hagen Federau, Joachim Hartjes, Harald Kirchner | 2015-09-15 |
| 8441747 | Optical module with minimized overrun of the optical element | Hagen Federau, Joachim Hartjes, Harald Kirchner, Bernhard Geuppert, Ulrich Bingel +1 more | 2013-05-14 |
| 8305701 | Connecting arrangement for an optical device | Heiko Methe, Sascha Licht | 2012-11-06 |
| 7859641 | Optical element module | Thomas C. Bischoff, Hagen Federau, Bernd Wuesthoff, Jochen Wieland | 2010-12-28 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber +8 more | 2010-07-20 |
| 7448763 | Optical subassembly and projection objective in semiconductor lithography | Andreas Frommeyer, G Fraser Morrison, Wolfgang Keller, Yim-Bun Patrick Kwan, Harald Kirchner | 2008-11-11 |