Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7448763 | Optical subassembly and projection objective in semiconductor lithography | Andreas Frommeyer, Wolfgang Keller, Yim-Bun Patrick Kwan, Harald Kirchner, Willi Heintel | 2008-11-11 |