Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393119 | Optical system and lithography apparatus | Dirk Schaffer | 2025-08-19 |
| 12058831 | Combined power electronics for an electric drive and a transmission control of the electric drive, inverter with such combined power electronics, electric drive with such an inverter | Michael Kohr, Maxim Pereverzev, Marco Igel, Pengshuai Wang, Roman Huff | 2024-08-06 |
| 8253947 | Device and method for measuring lithography masks | Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey +3 more | 2012-08-28 |